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Peb tsim cov tshuab PVD me me rau cov khoom siv kho kom zoo nkauj hauv cov khoom me me, xws li cov hniav nyiaj hniav kub, saib lub plhaub, thiab lwm yam. Cov xim tuaj yeem sawv kub, kub, dub, xiav, thiab lwm yam.
• Zuag qhia tag nrho cov qauv: Vertical pem hauv ntej qhov rooj, kab rov tav pem hauv ntej qhov rooj, rear lub tshuab nqus tsev twj tso kua mis
• Cov ntaub ntawv: Cov kab noj hniav yog ua los ntawm cov khoom zoo SUS304 stainless hlau
• Ion arc qhov chaw: Nruab nrog ntau pawg ntawm arc fais fab mov raws li qhov loj ntawm cov khoom siv
• Bias fais fab mov: Nruab nrog high-power ib-theem mem tes bias fais fab mov
• Ntau lub hom phiaj: Ntau lub hom phiaj ntawm titanium lossis stainless hlau raws li tus qauv
• Rotating system: Kev tswj hwm qhov sib txawv ntawm qhov ceev, ua ke ntawm kev hloov pauv thiab kev sib hloov, kev sib kis sab saud lossis qis dua.
• Lub tshuab nqus tsev (Cov cuab yeej siv kho kom zoo nkauj): Diffusion twj tso kua mis (yeem lub twj tso kua mis molecular) + Lub hauv paus twj tso kua mis + tshuab twj tso kua mis
• Gas tswj: Multi-way gas mass flow control system
• Cua sov system: hniav txheej 150 ℃ kub tswj PID adjustable thiab controllable
• Kev txawj ntse tswj: PLC ntse tswj + HMI puv xim kov interface, kom ua tiav tag nrho tsis siv neeg logic tswj
• Tswb thiab kev tiv thaiv: Tswb nyob rau hauv cov xwm txheej txawv txav thiab siv cov kev tiv thaiv zoo sib xws.
Kev sib xyaw ntawm PVD tshuab: