ua
Cov yam ntxwv tseem ceeb ntawm ARC-500 yog lub sijhawm voj voog ceev, kev ua haujlwm yooj yim thiab cov neeg siv khoom nyiam ntawm tus nqi zoo.Nws muaj plaub qhov kev ua haujlwm siab cathodic arc evaporation cathodes.Nws yog qhov kev xaiv zoo tshaj plaws rau cov neeg siv khoom tab tom nrhiav nkag mus rau hauv lub ntiaj teb txheej txheej los yog xav ntxiv qhov ceev qis-ntim PVD system rau lawv lub nkoj ntawm cov tshuab.
Technology Applied:
Cathodic arc evaporation cathodes
Qhov zoo:
Kev siv lub hom phiaj siab
High deposition tus nqi
Kev pauv sai cathode
• Zuag qhia tag nrho cov qauv: Vertical pem hauv ntej qhov rooj, kab rov tav pem hauv ntej qhov rooj, rear lub tshuab nqus tsev twj tso kua mis
• Cov ntaub ntawv: Cov kab noj hniav yog ua los ntawm cov khoom zoo SUS304 stainless hlau
• Ion arc qhov chaw: Nruab nrog ntau pawg ntawm arc fais fab mov raws li qhov loj ntawm cov khoom siv
• Bias fais fab mov: Nruab nrog high-power ib-theem mem tes bias fais fab mov
• Ntau lub hom phiaj: Ntau lub hom phiaj ntawm titanium lossis stainless hlau raws li tus qauv
• Rotating system: Kev tswj hwm qhov sib txawv ntawm qhov ceev, ua ke ntawm kev hloov pauv thiab kev sib hloov, kev sib kis sab saud lossis qis dua.
• Lub tshuab nqus tsev (Cov cuab yeej siv kho kom zoo nkauj): Diffusion twj tso kua mis (yeem lub twj tso kua mis molecular) + Lub hauv paus twj tso kua mis + tshuab twj tso kua mis
• Gas tswj: Multi-way gas mass flow control system
• Cua sov system: hniav txheej 150 ℃ kub tswj PID adjustable thiab controllable
• Kev txawj ntse tswj: PLC ntse tswj + HMI puv xim kov interface, kom ua tiav tag nrho tsis siv neeg logic tswj
• Tswb thiab kev tiv thaiv: Tswb nyob rau hauv cov xwm txheej txawv txav thiab siv cov kev tiv thaiv zoo sib xws.
Max.hnyav: 100kg
4-6 pob / hnub
MODULAR CAROUSEL SYSTEMS:
Dual-rotation kicker carousel lossis triple-rotation gearbox system
SOFTWARE:
Yooj yim siv thiab tu
Tswj system nrog kov npo
Cov ntaub ntawv kaw tseg thiab lub sijhawm tso saib ntawm cov txheej txheem tsis thiab ntws
Manual thiab automatic txheej txheem tswj
MACHINE DIMENSION:
Footprint [mm]: L2300 x W1600 x H1950