PVD txheej tshuab rau ceramic tablewares
Daim ntawv thov
| Qauv nab npawb | ARC-1000 | ARC-1200 | ARC-1400 Nws | ARC-1800 Nws | ARC-2000 |
| Dimension ntawm lub tshuab nqus tsev chamber (inch * qhov siab) | 1000 * 1100 hli | 1200 * 1400 hli | 1400 * 1600 hli | 1800 * 2000 hli | 2000 * 2200 hli |
| Khoom siv ntawm lub tshuab nqus tsev vacuum | SUS304 lossis SUS316L nrog lub tsho txias | ||||
| Ntau qhov chaw arc | 8-12 sets | 10-14 sets | 12-16 sets | 14-24 sets | 18-36 sets |
| Pumping system | molecular twj tso kua mis los yog diffusion twj + mechanical twj | molecular twj tso kua mis los yog diffusion twj tso kua mis + mechanical twj, twj tso kua mis | |||
| Lub Sijhawm Pumping | Los ntawm huab cua mus rau 5.0 * 10-2Pa tsawg dua 8 feeb | ||||
| Bias Power Supply | 20 kWm | 30 kWm | 40 kWm | 60 kWm | 60 kWm |
| Gas Distribution System nrog Mass Flow Controllers | ≥2sets | ||||
| Nqus txwv | 5.0 * 10-4 Pa | ||||
| Ua haujlwm kub | 100-250 centigrades | ||||
| Hom kev ua haujlwm | Tsis siv neeg lossis phau ntawv hom, los ntawm 10.4 nti PLC kov npo | ||||
| Tag Nrho Lub Zog | 70-180 kWm | 70-180 kWm | 70-180 kWm | 120-300 kWm | 120-300 kWm |
| Hneev taw | 3 * 3 m | 3 * 3 m | 3 * 4 m | 4 * 5 m | 4 * 5 m |
• Zuag qhia tag nrho cov qauv: Vertical pem hauv ntej qhov rooj, kab rov tav pem hauv ntej lub qhov rooj, rear nqus tsev vacuum system
• Cov ntaub ntawv: Cov kab noj hniav yog ua los ntawm cov khoom zoo SUS304 stainless hlau
• Ion arc qhov chaw: Nruab nrog ntau pawg ntawm cov khoom siv hluav taws xob arc raws li qhov loj ntawm cov khoom siv
• Bias fais fab mov: Nruab nrog high-power ib-theem mem tes bias fais fab mov
• Ntau lub hom phiaj: Ntau lub hom phiaj ntawm titanium lossis stainless hlau raws li tus qauv
• Rotating system: Kev tswj hwm qhov sib txawv ntawm qhov ceev, ua ke ntawm kev hloov pauv thiab kev sib hloov, kev sib kis sab saud lossis qis dua.
• Lub tshuab nqus tsev (Cov cuab yeej siv kho kom zoo nkauj): Diffusion twj tso kua mis (yeem lub twj tso kua mis molecular) + Cov twj tso kua mis hauv paus + cov twj siv tshuab
• Gas tswj: Multi-way gas mass flow control system
• Cua sov system: hniav txheej 150 ℃ kub tswj PID adjustable thiab controllable
• Kev txawj ntse tswj: PLC ntse tswj + HMI puv xim kov interface, kom ua tiav tag nrho tsis siv neeg logic tswj
• Tswb thiab kev tiv thaiv: Tswb nyob rau hauv cov xwm txheej txawv txav thiab siv cov kev tiv thaiv zoo sib xws.
Cov ntawv thov siv
1. Cov iav bangles
2. Ceramic vuas & mosaics
3. iav mosaics
4. Cov hniav nyiaj hniav kub
5. Cov iav teeb pom kev zoo
6. Cov khoom siv hlau
7. Cov khoom siv ceramic
8. Cov khoom siv kho hniav
9. Stainless hlau los xij rau hauv Titanium golden nplooj ntawv,
10. Shotgun qhov chaw, thiab lwm yam
