ua
-Ib/ob Qhov Rooj
Ncej thiab chamber yog ua los ntawm carbon stainless hlau.
Txhua lub qhov rooj muab lub qhov rais tshuaj xyuas rau kev pom kev tswj cov txheej txheem.Lub qhov rooj phab ntsa muab cov kab hlau tsis muaj hlau uas yooj yim tshem tawm rau kev txij nkawm.
-Customized Vacuum Chamber
Lub chamber muab sab hauv stainless hlau liners yooj yim tshem tawm los ntxuav.
Cov twj tso kua mis sawv ntawm nws sab nraub qaum.
Lub chamber muaj cov flange me me rau lub hom phiaj ntawm kev ntsuas.
-High lub tshuab nqus tsev twj tso kua mis
Diffusion twj + Booster twj + Mechanical twj tso kua mis
- Nqus ntsuas thiab tswj
Nrog hlau Pirani ntsuas + hlau Ionization ntsuas
- Fixtures txav system
- PLC tswj chav tsev
-Aluminium evaporation system nrog lub zog siab transformer
- Hlau ncej
Cov qauv tsim nyog
Txheej zaj duab xis yog uniform
Zaj duab xis tsim zoo
Siab twj tso kua mis ceev, lub voj voog ua haujlwm luv luv thiab kev ua haujlwm siab ntau lawm
Kev ua haujlwm yooj yim
Kev siv hluav taws xob tsawg thiab kev ua haujlwm ruaj khov
Qauv nab npawb | EV-1000 | EV-1200 | EV-1400 | EV-1800 | EV-2000 | Ob lub qhov rooj lossis Ob chav qauv muaj | |
Dimension ntawm lub tshuab nqus tsev chamber (inch * qhov siab) | 1000 * 1100 hli | 1200 * 1400 hli | 1400 * 1600 hli | 1800 * 2000 hli | 2000 * 2200 hli | ||
Khoom siv ntawm lub tshuab nqus tsev vacuum | Carbon steel, SUS304 lossis SUS316L | ||||||
Technology ntawm kev ua haujlwm | Lub tshuab nqus tsev evaporation nrog tungsten & aluminium filaments, siab zog evaporation transformer | ||||||
Pumping system | Diffusion twj + mechanical twj, twj tso kua mis | ||||||
Lub Sijhawm Pumping | Los ntawm huab cua mus rau 5.0 * 10-2Pa tsawg dua 8 feeb | ||||||
Nqus txwv | 5.0 * 10-4 Pa | ||||||
Ua haujlwm kub | Chav kub | ||||||
Hom kev ua haujlwm | Tsis siv neeg lossis phau ntawv hom, los ntawm 10.4 nti PLC kov npo | ||||||
Tag Nrho Lub Zog | 40-80 kWm | 70-140 kWm | |||||
Hneev taw | 2 * 2 m | 2 * 3 m | 3 * 3 m | 3 * 3 m | 3 * 4 m | 4 * 5 m | 5 * 6 m |
Cov units no koj tuaj yeem ua tau | 1. Qhov loj ntawm lub tshuab nqus tsev chamber 2. Kev teeb tsa ntawm cov twj tso kua mis | ||||||
Xaiv cov twj paj nruag | 1. Lub tshuab nqus dej 3. Arc ion deposition system 4. Magntron sputtering system |