Inline Magnetron Sputtering System
Inline magnetron sputtering txheej tshuab feem ntau yog DC (lossis MF) magnetron sputtering txheej tuaj yeem hloov kho rau ntau lub hom phiaj, xws li: tooj liab, titanium, chromium, stainless hlau, npib tsib xee thiab lwm yam khoom hlau uas tuaj yeem coated siv cov txheej txheem sputtering. tuaj yeem txhim kho zaj duab xis adhesion, reproducibility, ntom, uniformity thiab lwm yam ntxwv.
- a.Cov yam ntxwv tseem ceeb thiab cov tsis muaj
- b.kab rov tav kab qauv tuaj yeem pom tau ib txhij coated ntawm ib sab
- c.ntau lawm efficiency, ceev tshaj speeds txog li 1 min / ntaus
- d.modular tsim, kho yooj yim
- e.plating txheej txheem maturity, siab yield
- f.DC magnetron sputtering cathodes yuav txawv nyob ntawm cov neeg siv khoom xav tau
- g.Lub tshuab nqus tsev muaj lub tshuab twj tso kua mis, Cov twj tso kua mis, cov twj tso kua mis diffusion (molecular twj tso kua mis) Cov khoom sib xyaw
- h.Kab lub cev loj tuaj yeem sib txawv raws li cov neeg siv khoom xav tau
- 1) Lub tshuab nqus tsev lub cev cov ntaub ntawv siv SUS304, polishing lub tshuab nqus tsev chamber phab ntsa kho, sab nrauv phab ntsa txau polishing hlaws.
- 2) Siv lub rooj vag ywj pheej ntawm lub tshuab nqus tsev vacuum - flapper valve sib nrug, tuaj yeem txiav tawm tau zoo, txhim kho cov txheej txheem roj.Tam sim no peb lub tuam txhab txais yuav cov flapper valve tsim, nws seals zoo dua, ruaj khov dua li tam sim no hauv tsev nrov nrov plig plawg valve.
- 3) Kev xa tawm siv cov lus qhia sib nqus, tiv thaiv kev ruaj ntseg ntawm tus tsav.Rau txhua qhov ceev ntawm tag nrho cov kab ntau lawm siv VVVF lub cev muaj zog tsav, khiav ceev tuaj yeem hloov kho.
- 4) Hluav taws xob tswj qhov system: Kov Screen thiab PLC tsis siv neeg tswj, kev sib tham ntawm cov txiv neej-tshuab kom ua tiav cov ntaub ntawv tso saib, kev ua haujlwm tsis zoo thiab kev tswj hwm thev naus laus zis
- 1) Qhov kawg lub tshuab nqus tsev siab: 6 × 1 0E-4 Pa
- 2) qhov nruab nrab ntau lawm voj voog: raws li cov khoom txiav txim
- 3) Lub substrate tuav Loj: tuaj yeem kho raws li qhov xav tau ntawm
- 4) Film uniformity: ± 3% advanced mobile teb technology tau zoo heev txhim kho lub hom phiaj siv
- Segmented rhaub tsim yog qhov tsim nyog rau kev ua kom zoo.
Sau koj cov lus ntawm no thiab xa tuaj rau peb
