Aluminium Daim iav Inline Magnetron Sputtering Kab

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Aluminium Daim iav Inline Magnetron Sputtering Kab yog tsim los rau siab tso tawm ntawm iav iav tsim lub hom phiaj.Txhawm rau kom cov iav loj dua thiab saib xyuas cov iav tsis muaj zog, tshwj xeeb tshaj yog rau cov ntawv loj loj, peb feem ntau ua kab rov tav hom sputtering kab.Nws yog ib tug nruam magnetron txheej kab, nrog rau pem hauv ntej thiab nram qab ntxhib twj tso kua mis chamber, thiab tom qab lub hloov chamber, ua ntej thiab tom qab lub zoo pumping chamber, ib tug tsis chamber, xim plating chav.

Lub hom phiaj d esign: cylindrical magnetron sputtering cathodes lossis / thiab planar cathodes.

Fais fab mov: fais fab mov nrog siab zog DC los yog MF magnetron sputtering

Tsav system: cov menyuam tsav, zaus adjustable, induction hom chav qhov rooj qhib qhov system.

Lub tshuab nqus tsev: diffusion twj tso kua mis (los yog turbo molecular twj tso kua mis) + lub hauv paus twj tso kua mis + mechanical twj

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Cov yam ntxwv tseem ceeb

Aluminium Mirror Inline Magnetron Sputtering Line feem ntau tuaj nrog ntau lub tshuab nqus tsev kom ua tiav ntawm lub tshuab nqus tsev ntawm cov ntawv iav.
Cov yam ntxwv tseem ceeb:
1.Max.glass txheej loj: 2440x3660mm lossis customized
2. Multi-vacuum chambers thiab multi-sputtering chamber tsim muaj
3. Kab rov tav magnetic tswj kab muaj ib-kawg thiab ob-kawg qauv;iav ob chav tu, txheej, tshawb pom, pleev xim, ziab, txias tuaj yeem ua tiav txhua lub sijhawm
4. Sputtering txheej kab siv PLC rau tag nrho cov txheej txheem tswj thiab yog nruab nrog lub vijtsam xim los qhia cov ntaub ntawv txheej txheem txheej.

Txheej txheej: Titanium, Chrome, Stainless hlau, Aluminium, nyiaj, tooj liab, thiab lwm yam.

Compound: TiN, TiO2, thiab lwm yam.
Txheej thickness: 5-100nm
Kev xa tawm: 8-40% ntawm 380-780 nm wavelengths
Deposition kub: chav tsev kub

Qhov kawg siab tom qab 8 teev twj tso kua mis:
Nkag lub xauv chamber & lub tshuab nqus tsev xauv chamber: 5 × 10-1 Pa lossis qis dua
Buffer Chamber 1 : 3 × 10-3 Pa lossis qis dua
Sputtering Chamber: 2 × 10-3 Pa lossis qis dua
Buffer Chamber 2 : 3 × 10-3 Pa lossis qis dua
Exit lock chamber & nqus tsev vacuum: 5 × 10-1 Pa lossis qis dua